FBAR Simulation in Designer Interface
Model Description
Simulating FBARs has long been seen as a challenging subject due to their inherent electromechanical coupling and their relatively large acoustic size. OnScale allows full 3D models of these devices to be simulated in the time domain, providing a full spectrum of results from a single simulation. With OnScale on-demand HPC, hundreds of designs can be simulated in parallel to open up the realms of optimization of these devices in sensible time frame.
Here is a simple CAD model of a FBAR filter design which can be imported into OnScale through Designer, our CAD based simulation interface.
Model Geometry
Parametric Variables
The base CAD model was created in Onshape and allows the following design variables to be adjusted. By default the thickness of the piezoelectric and electrode layers are added as configuration variables for quick access through the Configuration Panel in Onshape.
| Parametric Variable | Description | Default Value |
|---|---|---|
| piez_layer | Thickness of piezoelectric Layer | 1.2 µm |
| alelec | Thickness of electrode | 220 nm |
| airgap | Thickness of air gap | 800 nm |
| smrbackx | Length of backing in X | 15 µm |
| smrbacky | Length of backing in Y | 15 µm |
| activex | Length of electrode in X | 10 µm |
| active y | Length of electrode in Y | 10 µm |
Outputs
Here are a list of the types of outputs to expect from this model:
- Electrical Impedance and Admittance
- Q of Resonances
- Mode Shapes (Harmonic Analysis) of base design
Post Processor 3D Outputs
Runtime Statistics
| Model size | 114912 elements |
| Solve Time | 172 s (4 CPU) |
| Core Hours | 0.191 |
| Memory Usage | 42 MB |
| Recommended CPU Configuration | 4 CPU |
CAD Project File
The following input files are required to run this model, click here to download the input files:
The base CAD model is publicly available to view and copy through Onshape: