MUTs

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Micro-machined Ultrasonic Transducers (MUTs). In general terms MUTs are basically MEMs structures that consist of two electrodes. One of the two electrodes are fixed whilst the other electrode is movable. Separating the two electrodes is an insulating layer and a vacuum-sealed gap. This moveable electrode is stimulated differently for PMUTs and CMUTs. PMUTs stimulate the movable electrode with a piezoelectric film, whereas stimulation in CMUTs occurs through electrostatic deflection.

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