Membrane displacement at 26.7 MHz
Model Description
Model of a simple Piezoelectric Micromachined Ultrasonic Transducer (PMUT) with an Aluminum Nitride active layer with Molybdenum electrodes residing in a Silicon substrate and operating into a water load.
Basic Model Schematic
Parametric Variables
The model allows the following design variables to be adjusted to control design metrics such as the fundamental frequency of the PMUT:
|
Parametric Variable |
Description |
Default Value |
|---|---|---|
|
piezo_thk |
Thickness of the active piezoelectric layer |
1 µm |
|
subs_rad |
Radius of the active piezoelectric layer |
22.5 µm |
|
cavity_height |
Gap between the membrane and substrate |
3 µm |
Outputs
Here are a list of the types of outputs to expect from this model:
- Time Histories (XY Graphs)
- Drive input signal
- Voltage and charge on electrodes
- Y-displacement at the central surface of the membrane
- Mode Shapes (Harmonic Analysis) of base design
- 4.8 MHz
- 26.7 MHz
- Acoustic Outputs
Post Processor 3D Outputs
Time History Outputs
Runtime Statistics
|
Model size |
14014 elements |
|
Solve Time |
50 s (2 CPU) |
|
Core Hours |
0.027 |
|
Memory Usage |
9 MB |
|
Recommended CPU Configuration |
2 CPU |
Files
The following input files are required to run this model, click here to download the input files: