Membrane displacement at 1.5 MHz
Model Description
Model of a 3D Piezoelectric Micromachined Ultrasonic Transducer (PMUT) array section with an Aluminum Nitride active layer on top of a thin Silicon Dioxide layer and Silicon substrate, operating into a water load.
Basic Model Schematic
Parametric Variables
The model allows the following design variables to be adjusted to control design of the PMUT array:
|
Parametric Variable |
Description |
Default Value |
|---|---|---|
|
nArX |
Number of PMUT Cells in X direction |
2 |
|
nArZ |
Number of PMUT Cells in Z direction |
2 |
|
radCav |
Radius of PMUT cavity |
95 µm |
Outputs
Here are a list of the types of outputs to expect from this model:
- Time Histories (XY Graphs)
- Drive input signal
- Voltage and charge on active electrode of each PMUT cell
- Y-displacement at the central surface of a PMUT membrane
- Mode Shapes (Harmonic Analysis) of base design
- 1.5 MHz
Post Processor 3D Outputs
Runtime Statistics
|
Model size |
1480160 elements |
|
Solve Time |
8 mins (8 CPU) |
|
Core Hours |
3.63 |
|
Memory Usage |
470 MB |
|
Recommended PU Configuration |
8 CPU |
Files
The following input files are required to run this model, click here to download the input files: