PMUT Array 3D

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Membrane displacement at 1.5 MHz

Model Description

Model of a 3D Piezoelectric Micromachined Ultrasonic Transducer (PMUT) array section with an Aluminum Nitride active layer on top of a thin Silicon Dioxide layer and Silicon substrate, operating into a water load.

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Basic Model Schematic

Parametric Variables

The model allows the following design variables to be adjusted to control design of the PMUT array:

Parametric Variable

Description

Default Value

nArX

Number of PMUT Cells in X direction

2

nArZ

Number of PMUT Cells in Z direction

2

radCav

Radius of PMUT cavity

95 µm

 Outputs

Here are a list of the types of outputs to expect from this model:

  •  Time Histories (XY Graphs)
    • Drive input signal
    • Voltage and charge on active electrode of each PMUT cell
    • Y-displacement at the central surface of a PMUT membrane
  • Mode Shapes (Harmonic Analysis) of base design
    • 1.5 MHz

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Post Processor 3D Outputs

Runtime Statistics

Model size

172480 elements

Solve Time

 187 s (2 CPU)

Core Hours

0.104

Memory Usage

45 MB

Recommended PU Configuration

2 CPU

 Files

The following input files are required to run this model:

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