CMUT 2D

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Picture1.png

CMUT displacement in collapse-mode

Model Description
Axisymmetric model of a simple Capacitive Micromachined Ultrasonic Transducer (CMUT) operating into a water load.

Model_Schematic.PNG

Basic Model Schematic

 

Parametric Variables
The model allows the following design variables to be adjusted to control design metrics such as the fundamental frequency of the CMUT:

Parametric Variable

Description

Default Value

 ThkGap

 Thickness of gap

 241 nm

 ThkMem

 Thickness of membrane

 2 um

 ThkOx

 Thickness of Silicon Oxide layer

 350 nm

 RadMem

 Radius of membrane

 12.25 um

 ThkSub

 Thickness of substrate

 30 um

 RadSub

 Radius of substrate

 75 um

 ThkLoad

 Thickness of load medium

 50 um

 

Outputs
Here are a list of the types of outputs to expect from this model:

  • Electrical Impedance
  • Membrane Displacement
  • Mode Shapes (Harmonic Analysis) of base design
  • Acoustic Outputs

Output.png

Model Outputs

 

Base Design Simulation Statistics

Model size

1219 elements

Solve Time

 24 s (2 CPU)

Core Hours

 0.02

Memory Usage

 7 MB

Recommended Cloud Node Setting

 2 CPU

Files

The following input files are required to run this model:

Design Studies

Coming Soon...

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