CMUT displacement in collapse-mode
Model Description
Axisymmetric model of a simple Capacitive Micromachined Ultrasonic Transducer (CMUT) operating into a water load.
Basic Model Schematic
Parametric Variables
The model allows the following design variables to be adjusted to control design metrics such as the fundamental frequency of the CMUT:
|
Parametric Variable |
Description |
Default Value |
|---|---|---|
|
ThkGap |
Thickness of gap |
241 nm |
|
ThkMem |
Thickness of membrane |
2 µm |
|
ThkOx |
Thickness of Silicon Oxide layer |
350 nm |
|
RadMem |
Radius of membrane |
12.25 µm |
|
ThkSub |
Thickness of substrate |
30 µm |
|
RadSub |
Radius of substrate |
75 µm |
|
ThkLoad |
Thickness of load medium |
50 µm |
Outputs
Here are a list of the types of outputs to expect from this model:
- Electrical Impedance
- Membrane Displacement
- Mode Shapes (Harmonic Analysis) of base design
- Acoustic Outputs
Model Outputs
Base Design Simulation Statistics
|
Model size |
1219 elements |
|
Solve Time |
24 s (2 CPU) |
|
Core Hours |
0.02 |
|
Memory Usage |
7 MB |
|
Recommended Cloud Node Setting |
2 CPU |
Files
The following input files are required to run this model, click here to download the input files: