PMUT 2D

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Membrane displacement at 26.7 MHz

Model Description

Model of a simple Piezoelectric Micromachined Ultrasonic Transducer (PMUT) with an Aluminum Nitride active layer with Molybdenum electrodes residing in a Silicon substrate and operating into a water load.

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Basic Model Schematic

Parametric Variables

The model allows the following design variables to be adjusted to control design metrics such as the fundamental frequency of the PMUT:

Parametric Variable

Description

Default Value

piezo_thk

Thickness of the active piezoelectric layer

1 µm

subs_rad

Radius of the active piezoelectric layer

22.5 µm

cavity_height

Gap between the membrane and substrate

3 µm

 Outputs

Here are a list of the types of outputs to expect from this model:

  •  Time Histories (XY Graphs)
    • Drive input signal
    • Voltage and charge on electrodes
    • Y-displacement at the central surface of the membrane
  • Mode Shapes (Harmonic Analysis) of base design
    • 4.8 MHz
    • 26.7 MHz
  • Acoustic Outputs

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Post Processor 3D Outputs

im3.png

Time History Outputs

Runtime Statistics

Model size

14014 elements

Solve Time

 50 s (2 CPU)

Core Hours

0.027

Memory Usage

9 MB

Recommended CPU Configuration

2 CPU

 

Files

The following input files are required to run this model:

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Comments

1 comment
  • The title of this article is wrong.
    In fact it's a 2D model (filename is correct).

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