FBAR 3D

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3D FBAR Surface Deformation at Resonance

 

Model Description

Film bulk acoustic resonators (FBARs) can often exhibit spurious modes across the pass band which is one of design challenges an RF engineer faces. OnScale gives engineers the ability to quickly prototype a design to understand how effective it is removing these modes.

The quarter scale FBAR model provides a simple starting structure consisting of a piezoelectric active layer (Aluminum Nitride) with Molybdenum electrodes on a silicon substrate.

 

FBAR3D_schematic-1024x389.png

Model Schematic

 

Parametric Variables

The base model allows the following design variables to be adjusted. By default electrode thickness and electrode aspect ratio are set as design variables to be swept (indicated by *).

 

Parametric Variable

Description

Default Value

aln_thk*

Thickness of AlN piezoelectric layer

800 nm

targ_wid*

Width of top electrode

30 um

sub_out

Distance from end of cavity to end of AlN

5 µm

cav_out

Distance from end of electrode to end of cavity

5 µm

cav_thk

Thickness of cavity

1 µm

elec_bot

Bottom electrode thickness

400 nm

elec_tot

Top electrode thickness

400 nm

 

Outputs

A wide range of outputs can be generated, including:

  • Electrical Impedance

  • Quality Factor

  • Mode Shapes (Harmonic Analysis)

 

FBAR3D_Outputs-1024x513.png

Post Processor Outputs

Runtime Statistics

Model Size

184093 elements

Solve Time

343 secs (16 CPUS)

Core Hours

1.54

Memory Usage

269 MB

Recommended CPU Configuration

16 CPU

 

Files

The following input files are required to run this model:

 

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