Maximum Velocity across structure
Model Description
The use of acoustic mirrors is typically used to reduce substrate losses in SMRs to maintain a high quality factor, a key performance metric for these types of filters.
To keep the waves from escaping into the substrate, an acoustic Bragg reflector is created by stacking thin layers of alternating stiffness and density. A common design criteria is to use quarter wavelength thick layers.
The simple 2D model consists of an Aluminum Nitride active layer on top multiples layers of Silicon Dioxide and Tungsten and Silicon substrate.
Half Symmetry Model Schematic
Parametric Variables
The base model allows the following design variables to be adjusted. By default, Aluminum Nitride thickness and number of reflective layers (pairs) are set as design variables to be swept (indicated by *):
|
Parametric Variable |
Description |
Default Value |
|---|---|---|
|
aln_thk* |
Thickness of the active piezoelectric layer |
2.75 µm |
|
nlayers* |
Number of Silicon Dioxide and Tungsten layers (pairs) |
5 |
|
dev_wid |
Width of active area |
100 µm |
|
sub_out |
Substrate width to boundary |
50 µm |
|
subs_thk |
Silicon substrate thickness |
2 µm |
Outputs
A wide range of outputs can be generated, including:
- Electrical Impedance
- Quality Factor
- Mode Shapes (Harmonic Analysis)
Example Post Processor Outputs
Runtime Statistics
|
Model size |
29500 elements |
|
Solve Time |
201 s (2 CPU) |
|
Core Hours |
0.112 |
|
Memory Usage |
7 MB |
|
Recommended CPU Configuration |
2 CPU |
Files
The following input files are required to run this model, click here to download the input files: